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What do you mean how?
Just put a series of flip_flop gates of them together in a nice package to store a hash identifer for the human. Use the ones that are powered via body heat and can react to 28Ghz/39Ghz.
Inject them into people under a fake flu called covid. Since many of them are breaking tell people they need 2, 3, 4 shots they will believe it until you get the bugs worked out. The ones who die from getting lodged in the heart or brain, you can just say the cdc said there is no connection.
When its all done you can basically track everyone.
oh you mean how so small? They just use photolithography and vapor phase epitaxy to dope the silicon.
Simple stuff hoss. You should read up more.